Oxford PlasmaPro System 100

Oxford PlasmaPro System 100

Photo of FEI quanta 3D FEG dual beam SEM/FIB FEI quanta 3D FEG dual beam SEM/FIB
 
Photo of Heidelberg DWL 66 Laser Mask Writer

Heidelberg DWL 66 Laser Mask Writer

Photo of SEM images

SEM images of fabricated silicon photonic devices: Left-grating coupler; Right-photonic crystal nano-cavity